한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2006년도 제31회 학술논문발표회 초록집
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- Pages.88-88
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- 2006
Reliable Thickness Measurement of Ultra-thin SiO2 films using XPS by Precise Setting of the Surface Normal
- Kim Kyung-Joong (Division of Advanced Technology, Korea Research Institute of Standards and Science) ;
- Moon Dae-Won (Division of Advanced Technology, Korea Research Institute of Standards and Science)
- 발행 : 2006.08.01