1:1 Electron-beam Emission Lithography: a method for MIM e-beam projection

  • Choi Kwang-Nam (Department of Electronic Engineering KyungHee University) ;
  • Kwak Sung-Kwan (Department of Electronic Engineering KyungHee University) ;
  • Chung Kwan-Soo (Department of Electronics, Materials Research Center for Information Display, KyungHee University) ;
  • Kim Dong-Sik (Department of Computer System and Engineering InHa Technical College)
  • 발행 : 2006.02.01