한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2006년도 제30회 학술논문발표회 초록집
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- Pages.191-191
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- 2006
Structure and mechanical characteristics of TiZrAIN nanostructured thin films by CFUBMS
- Kim Youn-J. (Department of Advanced Materials Engineering, SungKyunKwan University) ;
- Lee Ho-Y. (Department of Advanced Materials Engineering, SungKyunKwan University) ;
- Kim Yong-M. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) ;
- Han Jeon-G. (Department of Advanced Materials Engineering, SungKyunKwan University)
- 발행 : 2006.02.01