Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2006.02a
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- Pages.187-187
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- 2006
Electrical properties of $HfO_xN_y$ thin films deposited by PECVD
- Park J.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Hyun J.S. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Kang B.C. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Boo J.H. (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2006.02.01
Abstract
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