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The Korean Vacuum Society
http://www.kvs.or.kr
Proceedings of the Korean Vacuum Society Conference
(한국진공학회:학술대회논문집)
2006.02a
/
Pages.155-155
/
2006
The Korean Vacuum Society (한국진공학회)
FVA증착법에 의해 합성된 Ta-C 박막의 열처리 효과
Lee Yeong-Gwang
;
O Gyu-Hwan
;
Lee Gwang-Ryeol
이영광
(서울대학교) ;
오규환
(서울대학교) ;
이광렬
(한국과학기술원)
Published : 2006.02.01
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