Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2006.02a
- /
- Pages.114-114
- /
- 2006
저온프로세스를 이용한 $Si_{1-x}Ge_x$ 박막 제작
- Chu Byung-Yoon (Division of Electronics and Information, Chonbuk National University) ;
- Yang Sung-Chae (Division of Electronics and Information, Chonbuk National University) ;
- Lee Jung-Hui (Division of Electronics and Information, Chonbuk National University) ;
- Choi Byoung-Jung (Division of Electronics and Information, Chonbuk National University)
- Published : 2006.02.01
Abstract
Keywords