한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2006년도 제30회 학술논문발표회 초록집
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- Pages.114-114
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- 2006
저온프로세스를 이용한 $Si_{1-x}Ge_x$ 박막 제작
- Chu Byung-Yoon (Division of Electronics and Information, Chonbuk National University) ;
- Yang Sung-Chae (Division of Electronics and Information, Chonbuk National University) ;
- Lee Jung-Hui (Division of Electronics and Information, Chonbuk National University) ;
- Choi Byoung-Jung (Division of Electronics and Information, Chonbuk National University)
- 발행 : 2006.02.01