Fabrication and Characteristics of In-Plane Type Micro Piezoelectric Micro Grippers with Pneumatic Lines for Biological Cells and Micro Parts Handling

바이오 셀 및 마이크로 부품 handling을 위한 pneumatic line을 갖는 in-plane 형 마이크로 압전 그리퍼 제조 및 특성

In-plane type micro piezoelectric micro grippers with pneumatic lines for manipulation biological cells and micro parts were designed, fabricated, and characterized. Micro grippers were fabricated through the final micro-sanding process after wafer level bonding between the etched 4' Si wafer with pneumatic channels and 4' glass wafer. Displacements between two jaws of fabricated micro grippers were linearly increased with applying voltages to piezoelectric actuator. In the case of applying 80 V, the displacement between two jaws was $160{\mu}m$. Using fabricated micro grippers, manipulation tests for biological cell and micro parts with the sizes less than $100{\mu}m$ are in process.