한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 춘계학술대회 논문집
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- Pages.473-474
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- 2006
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- 2005-8446(pISSN)
패터닝된 Ni 촉매 금속 위에서의 탄소나노튜브 성장
Selective growth of carbon notubes by patterning nickel catalyst metal
초록
Aligned carbon nanotubes(CNTs) array were synthesized using direct current plasma-enhanced chemical vapor deposition. The nickel microgrids catalyzed the growth of carbon nanotubes which take on the area of the nickel microgrids. Selective growth of areas of nanotubes was achieved by patterning the nickel film. CNTs were grown on the pretreated substrates at 30%
키워드