Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.05a
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- Pages.473-474
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- 2006
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- 2005-8446(pISSN)
Selective growth of carbon notubes by patterning nickel catalyst metal
패터닝된 Ni 촉매 금속 위에서의 탄소나노튜브 성장
Abstract
Aligned carbon nanotubes(CNTs) array were synthesized using direct current plasma-enhanced chemical vapor deposition. The nickel microgrids catalyzed the growth of carbon nanotubes which take on the area of the nickel microgrids. Selective growth of areas of nanotubes was achieved by patterning the nickel film. CNTs were grown on the pretreated substrates at 30%
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