Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

  • 2006.05a
  • /
  • Pages.131-132
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  • 2006
  • /
  • 2005-8446(pISSN)
Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

A Micro-positioning Parallel Mechanism Platform with 100-degree Tilting Capability

높은 회전성능($100^{\circ}$)을 가지는 초정밀 위치결정용 마이크로 병렬기구 플랫폼의 개발

  • Yoon Yong-Ha (School of Mechanical and Aerospace Engineering, SNU) ;
  • Kang Deuk-Soo (School of Mechanical and Aerospace Engineering, SNU) ;
  • Seo Tae-Won (School of Mechanical and Aerospace Engineering, SNU) ;
  • Kim Hong-Seok (School of Mechanical and Aerospace Engineering, SNU) ;
  • Sung Tai-Jong (School of Mechanical and Aerospace Engineering, SNU) ;
  • Kim Jong-Won (School of Mechanical and Aerospace Engineering, SNU)
  • 윤용하 (서울대 대학원 기계항공공학부) ;
  • 강득수 (서울대 대학원 기계항공공학부) ;
  • 서태원 (서울대 대학원 기계항공공학부) ;
  • 김홍석 (서울대 대학원 기계항공공학부) ;
  • 성태종 (서울대 대학원 기계항공공학부) ;
  • 김종원 (서울대 기계항공공학부)
  • Published : 2006.05.01
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Abstract

This paper presents a micro-positioning platform based on the unique parallel mechanism recently developed by the authors. The platform has a meso-scale rectangular shape whose size is $20{\times}23m$. The stroke is 5 mm for both the x- and y-axis and 100 degrees for the ${\alpha}$-axis(the rotational axis along the x-axis). The platform is actuated by the three sets of two-stage linear actuators: a linear motor for rough positioning and a piezo actuator for fine positioning. The platform is already assembled. Experimental results of the positioning measurements and control performance are presented.

Keywords