Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.05a
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- Pages.25-26
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- 2006
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- 2005-8446(pISSN)
Absolute position measurement by lateral shearing interferometry of point-diffracted spherical waves
점회절 구면파의 전단 간섭계를 이용한 절대위치 측정
Abstract
The method measuring the absolute position of a point diffraction source emitting a spherical wavefront in three-dimension is proposed. Two-dimensional interference of spherical wavefronts is used to overcome ambiguity of phase order. The spherical wavefront is explicated by Taylor series expansion, from which a radius of curvature of a spherical wavefront and its center position in three-dimension are obtainable. The spherical wavefront is reconstructed by a modified lateral shearing interferometer, which uses single-mode fiber as a point diffraction source.