한국표면공학회:학술대회논문집 (Proceedings of the Korean Institute of Surface Engineering Conference)
- 한국표면공학회 2006년도 추계학술발표회 초록집
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- Pages.59-59
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- 2006
The effect of magnetron rotation on plasma characteristics and the physical properties of films
- Moon, Chang-S. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Lee, Ho-Y. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Kim, Kab-S. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Han, Jeon-G. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- 발행 : 2006.10.19