Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.10a
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- Pages.59-59
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- 2006
The effect of magnetron rotation on plasma characteristics and the physical properties of films
- Moon, Chang-S. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Lee, Ho-Y. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Kim, Kab-S. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University) ;
- Han, Jeon-G. (Center for Advanced Plasma Surface Technology, Sungkyunkwan University)
- Published : 2006.10.19
Abstract
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