Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2006.10a
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- Pages.31-32
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- 2006
Remote plasma etching of amorphous silicon using pin to plate dielectric barrier discharge
Pin to Plate Dielectric Barrier Dischrge 방식의 Romote 대기압 플라지므라르 이용한 비정질 Si 식각
Abstract
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