한국소음진동공학회:학술대회논문집 (Proceedings of the Korean Society for Noise and Vibration Engineering Conference)
- 한국소음진동공학회 2006년도 춘계학술대회논문집
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- Pages.1404-1408
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- 2006
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- 1598-2548(pISSN)
대형 초정밀 스테이지용 복합 아이솔레이터 개발
Development of the Hybrid Vibration Isolator for Large Superprecision Stage
초록
In this paper, a hybrid-type vibration isolator which has air chamber(spring) and viscous damper in series is developed. The developed vibration isolator is designed to perform 3 following functions : spring function for normal operating conditions, damping function to reduce an impact for sudden move of upper beam, and finally leveling function. Based on the given natural frequency and damping factor, the design procedure is proposed. The performance of the developed isolator is tested by measuring stiffness and damping.
키워드