Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2006.05a
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- Pages.831-836
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- 2006
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- 1598-2548(pISSN)
Active Control of Vibration Isolation Table Using Air-spring
공기스프링을 이용한 방진 테이블의 능동 제어
- An, Chae-Hun ;
- Yim, Kwang-Hyeok ;
- Kwon, Hyeok-Jin ;
- Jung, Jin-Hoon ;
- Bae, Yoon-Hwa ;
- Jin, Kyong-Bok ;
- Rim, Kyung-Hwa
- 안채헌 (한국기술교육대학교 메카트로닉스공학부 대학원) ;
- 임광혁 (한국기술교육대학교 메카트로닉스공학부) ;
- 권혁진 (한국기술교육대학교 메카트로닉스공학부) ;
- 정진훈 (한국기술교육대학교 메카트로닉스공학부) ;
- 배윤화 (한국기술교육대학교 메카트로닉스공학부) ;
- 진경복 (한국기술교육대학교 메카트로닉스공학부) ;
- 임경화 (한국기술교육대학교)
- Published : 2006.05.01
Abstract
In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.
Keywords