Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2006.10a
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- Pages.178-183
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- 2006
AC Servo Motor와 Ball screw를 이용한 정밀 위치제어시스템의 기계적 특성 분석 및 개선
- Published : 2006.10.12
Abstract
Effect of coulomb friction and backlash on the single loop posit ion control has been studied for the precision position control. We studied and showed the limit cycle on the single loop system which used a ball screw that had the backlash. Also, We made an inner loop with a classical velocity and torque controller which was forcing the
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