Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2006.10a
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- Pages.68-71
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- 2006
Multi-component $ZnO-In_2O_3-SnO_2$ thin films deposited by RF magnetron co-sputtering
- Lee, Byoung-Hoon (Department of Material Science and Engineering, Korea University) ;
- Hur, Jae-Sung (Department of Material Science and Engineering, Korea University) ;
- Back, Sang-Yul (Department of Material Science and Engineering, Korea University) ;
- Lee, Jeong-Seop (Department of Material Science and Engineering, Korea University) ;
- Song, Jung-Bin (Department of Material Science and Engineering, Korea University) ;
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Son, Chang-Sik
(Department of Photonics, Silla University) ;
- Choi, In-Hoon (Department of Material Science and Engineering, Korea University)
- Published : 2006.10.12
Abstract
Multi-component
Keywords