한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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- Pages.103-106
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- 2006
레이저 다이오드 Mirror면의 Anti-Reflection 코팅 박막 제작 및 특성 분석
The Manufacture and Properties Analysis of Anti-Reflection Coating Thin Film of Laser Diode Mirror
- 기현철 ;
- 김선훈 ;
- 김상택 ;
- 김효진 ;
- 김회종 (한국광기술원 광소자팀) ;
- 홍경진 (광주대학교 광통신전자공학부) ;
- 민용기 (광주대학교 광통신전자공학부) ;
- 조재철 (초당대학교 전자공학과) ;
- 구할본 (전남대학교 공과대학 전기공학과)
- Ki, Hyun-Chul ;
- Kim, Sean-Hoon ;
- Kim, Sang-Taek ;
- Kim, Hyo-Jin ;
- Kim, Hwe-Jong ;
- Hong, Kyung-Jin ;
- Min, Yong-Ki ;
- Cho, Jae-Cheol ;
- Gu, Hal-Bon
- 발행 : 2006.12.01
초록
Semiconductor laser diode has a reflective facet in a both-ends side fundamentally. Laser performance for improving, Anti-Reflection and High-reflection coating on the facet of semiconductor laser diode. To prevent internal feedback from both facets for realizing superluminescent diode and reducing the reflection-induced intensity noise of laser diode, it's key techniques are AR/HR coatings. In the study AR coating film were manufactured by Ion-Assisted Deposition(IAD) system. Then manufactured coating film measurement electrical properties(L-I-V, Se, Resistor) and Optical properties (wavelength FFP)