한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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- Pages.96-100
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- 2006
레이져 용삭법에 의한 탄소입자 운동모델 - 플라즈마와의 상관관계 -
The Carbon Plume Simulation by Pulsed Laser Ablation Method - Interactions between Ar plasmas and Carbon Plume -
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소순열
(목포대학교 전기제어신소재공학부) ;
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정해덕
(목포대학교 전기제어신소재공학부) ;
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이진
(목포대학교 전기제어신소재공학부) ;
- 민용기 (목포대학교 전기제어신소재공학부) ;
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박계춘
(목포대학교 전기제어신소재공학부) ;
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김창선
(목포대학교 전기제어신소재공학부) ;
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문채주
(목포대학교 전기제어신소재공학부)
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So, Soon-Youl
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Chung, Hae-Deok
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Lee, Jin
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
- Park, Gye-Choon (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Park, Gye-Chun
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Kim, Chang-Sun
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
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Moon, Chae-Joo
(Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University)
- 발행 : 2006.12.01
초록
A pulsed laser ablation deposition (PLAD) technique is an excellent method for the fabrication of amorphous carbon (a-C) films. This paper was focused on the understanding and analysis of the motion of carbon atom (C) and carbon ion (