한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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- Pages.43-47
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- 2006
유도결합형 제논의 가스압력 및 RF전력에 따른 플라즈마의 전기적 특성
Electrical Properties of Plasma According to Gas Pressure and RF Power of Xe-Inductively Coupled Plasma
- Choi, Yong-Sung (Dept. of Electrical Eng., Dongshin University) ;
- Lee, Kyung-Sup (Dept. of Electrical Eng., Dongshin University)
- 발행 : 2006.12.01
초록
In this paper, parameters of electron temperature and density for the mercury-free lighting-source were measured to diagnosis and analyze in Xe based inductively coupled plasma (ICP). As results at several dependences of 20~100mTorr Xenon pressure, the brightness of discharge tube was higher (4,900
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