Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.12a
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- Pages.43-47
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- 2006
Electrical Properties of Plasma According to Gas Pressure and RF Power of Xe-Inductively Coupled Plasma
유도결합형 제논의 가스압력 및 RF전력에 따른 플라즈마의 전기적 특성
- Choi, Yong-Sung (Dept. of Electrical Eng., Dongshin University) ;
- Lee, Kyung-Sup (Dept. of Electrical Eng., Dongshin University)
- Published : 2006.12.01
Abstract
In this paper, parameters of electron temperature and density for the mercury-free lighting-source were measured to diagnosis and analyze in Xe based inductively coupled plasma (ICP). As results at several dependences of 20~100mTorr Xenon pressure, the brightness of discharge tube was higher (4,900
Keywords
- Electron temperature;
- Electron density;
- Mercury-free lighting-source;
- Inductively coupled plasma;
- Xe