한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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- Pages.27-32
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- 2006
LIF를 이용한 Hg-Ar의 플라즈마 밀도 측정
Plasma Density Measurement of Hg-Ar by LIF Method
- Choi, Yong-Sung (Dongshin University) ;
- Hwang, Jong-Sun (Namdo Provincial College) ;
- Park, Kye-Choon (Mokpo National University) ;
- Song, Min-Jong (Kwangju Health College) ;
- Kim, Hyeong-Gohn (Chosun College of Science and Technology) ;
- Lee, Kyung-Sup (Dongshin University)
- 발행 : 2006.12.01
초록
In this paper, we introduced a LIF measurement method and summarized the theoretical side. When an altered wavelength of laser and electric power, lamp applied electric power, we measured the relative density of the metastable state in mercury after observing a laser induced fluorescence signal of 404.8nm and 546.2nm, and confirmed the horizontal distribution of plasma density in the discharge lamp. Due to this generation, the extinction of atoms in a metastable state occurred through collision, ionization, and excitation between plasma particles. The density and distribution of the metastable state depended on the energy and density of plasma particles, intensely. This highlights the importance of measuring density distribution in plasma electric discharge mechanism study. The results confirmed the resonance phenomenon regarding the energy level of atoms along a wavelength change, and also confirmed that the largest fluorcscent signal in 436nm, and that the density of atoms in 546.2nm (