한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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- Pages.15-19
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- 2006
Ar 플라즈마 상태에서의 탄소 입자 운동 모델링
The Motion of Carbon Plume in Ar Plasmas
- 소순열 (목포대학교 전기제어신소재공학부) ;
- 정해덕 (목포대학교 전기제어신소재공학부) ;
- 이진 (목포대학교 전기제어신소재공학부) ;
- 박계춘 (목포대학교 전기제어신소재공학부) ;
- 김창선 (목포대학교 전기제어신소재공학부) ;
- 문채주 (목포대학교 전기제어신소재공학부)
- So, Soon-Youl (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
- Chung, Hae-Deok (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
- Lee, Jin (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
- Park, Gye-Choon (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
- Kim, Chang-Sun (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University) ;
- Moon, Chae-Joo (Division of Electrical Engineering, Control System and Advanced Materials, Mokpo National University)
- 발행 : 2006.05.19
초록
A pulsed laser ablation deposition (PLAD) technique is an excellent method for the fabrication of amorphous carbon (a-C) films, because it can generate highly energetic carbon clusters on a substrate. This paper was focused on the understanding and analysis of the motion of C particles in laser ablation assisted by Ar plasmas. The simulation has carried out under the pressure P=50 mTorr of Ar plasmas. Two-dimensional hybrid model consisting of fluid and Monte-Carlo models was developed and three kinds of the ablated particles which are carbon atom (C), ion (