한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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- Pages.473-474
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- 2006
박스캐소드 스퍼터로 성장시킨 IZO 투명 전도막의 급속 열처리 효과
Rapid thermal annealing effect of IZO transparent conducting oxide films grown by a box cathode sputtering
- Bae, Jung-Hyeok (Kumoh National Institute of Technology (KIT)) ;
- Moon, Jong-Min (Kumoh National Institute of Technology (KIT)) ;
- Jeong, Soon-Wook (Kumoh National Institute of Technology (KIT)) ;
- Kim, Han-Ki (Kumoh National Institute of Technology (KIT)) ;
- Yi, Min-Soo (Sangju National University)
- 발행 : 2006.06.22
초록
We report on the rapid thermal annealing effect on the electrical, optical, and structural properties of IZO transparent conducting oxide films grown by box cathode sputtering (BCS). To investigate structural properties of rapid thermal annealed IZO films in