Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.06a
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- Pages.473-474
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- 2006
Rapid thermal annealing effect of IZO transparent conducting oxide films grown by a box cathode sputtering
박스캐소드 스퍼터로 성장시킨 IZO 투명 전도막의 급속 열처리 효과
- Bae, Jung-Hyeok (Kumoh National Institute of Technology (KIT)) ;
- Moon, Jong-Min (Kumoh National Institute of Technology (KIT)) ;
- Jeong, Soon-Wook (Kumoh National Institute of Technology (KIT)) ;
- Kim, Han-Ki (Kumoh National Institute of Technology (KIT)) ;
- Yi, Min-Soo (Sangju National University)
- Published : 2006.06.22
Abstract
We report on the rapid thermal annealing effect on the electrical, optical, and structural properties of IZO transparent conducting oxide films grown by box cathode sputtering (BCS). To investigate structural properties of rapid thermal annealed IZO films in