한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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- Pages.382-383
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- 2006
MOD 법에 의한 압전 SBN 박막의 성장 온도 의존성 및 특성
The dependent of growth temperature of piezoelectric SBN Thin Film by Metal Organic Decomposition Process and their properties
- Kim, Kwang-Sik (Department of Materials Science and Engineering, Chung-Buk National University) ;
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Jang, Gun-Ik
(Department of Materials Science and Engineering, Chung-Buk National University) ;
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Ur, Soon-Chul
(Research Center for Sustainable ECo-Devices and Materials (ReSEM), Chung-ju National University)
- 발행 : 2006.06.22
초록
The tungsten bronze type of strontium barium niobate(SBN) thin film was synthesized by metal organic decomposion method for SBN stock solution and the SBN thin film process were deposited by spin-coating process on Pt-deposited si-wafer(100) by magnetron sputtering system. The thickness of SBN thin film was 150~200 nm and were optimized for rpm of spin-coater system. The structural variation of SBN thin film was studied by TG-DTA and XRD. The deposited SBN stock solution on annealing at