Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.06a
- /
- Pages.125-126
- /
- 2006
Dependence of Substrate Type on the Properties of ZnO Films deposited by r.f. magnetron sputtering
ZnO 박막의 기판종류에 따른 구조적, 광학적 특성
- Lee, Dong-Jin (Kunsan Nat. Univ.) ;
-
Lee, Jae-Hyeong
(Kunsan Nat. Univ.)
;
-
Ju, Jung-Hun
(Kunsan Nat. Univ.)
;
- Song, Jun-Tae (Sungkyunkwan Univ) ;
-
Lee, Kyu-Il
(Sungkyunkwan Univ)
;
- Yang, Kea-Joon (Chungju Nat. Univ) ;
-
Lim, Dong-Gun
(Chungju Nat. Univ)
- Published : 2006.06.22
Abstract
ZnO Films have been prepared on polycarbonate (PC), polyethylene terephthalate (PET), and Coming 7059 substrates by r.f. magnetron sputtering technique. A comparison of the properties of the films deposited on polymer and glass substrates was performed. In addition, the effect of the sputter power on the structural and optical properties of these films was evaluated.