Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.06a
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- Pages.103-104
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- 2006
Analysis of the Texture Structure of Transparent Conductive AZO thin films for LED Applications.
LED적용을 위한 AZO 투명전도 박막의 표면 texture 구조분석
- Kim, Kyeong-Min (Wonkwang Univ. School of Electrical Electronic and Information Engineering.) ;
- Kim, Deok-Kyu (Wonkwang Univ. School of Electrical Electronic and Information Engineering.) ;
- Oh, Sang-Hyun (Wonkwang Univ. School of Electrical Electronic and Information Engineering.) ;
- Park, Choon-Bae (Wonkwang Univ. School of Electrical Electronic and Information Engineering.)
- 김경민 (원광대학교 전기전자 및 정보공학부) ;
- 김덕규 (원광대학교 전기전자 및 정보공학부) ;
- 오상현 (원광대학교 전기전자 및 정보공학부) ;
- 박춘배 (원광대학교 전기전자 및 정보공학부)
- Published : 2006.06.22
Abstract
Transparent conductive oxide (TCO) are necessary as front electrode for increased efficiency of LED. In our paper, transparent conducting alminum-doped Zinc oxide films (AZO) were prepared by rf magnetron sputtering on glass (corning 1737) substrate, were then annealed at temperature