Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Analysis of the Texture Structure of Transparent Conductive AZO thin films for LED Applications.

LED적용을 위한 AZO 투명전도 박막의 표면 texture 구조분석

  • Kim, Kyeong-Min (Wonkwang Univ. School of Electrical Electronic and Information Engineering.) ;
  • Kim, Deok-Kyu (Wonkwang Univ. School of Electrical Electronic and Information Engineering.) ;
  • Oh, Sang-Hyun (Wonkwang Univ. School of Electrical Electronic and Information Engineering.) ;
  • Park, Choon-Bae (Wonkwang Univ. School of Electrical Electronic and Information Engineering.)
  • 김경민 (원광대학교 전기전자 및 정보공학부) ;
  • 김덕규 (원광대학교 전기전자 및 정보공학부) ;
  • 오상현 (원광대학교 전기전자 및 정보공학부) ;
  • 박춘배 (원광대학교 전기전자 및 정보공학부)
  • Published : 2006.06.22
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Abstract

Transparent conductive oxide (TCO) are necessary as front electrode for increased efficiency of LED. In our paper, transparent conducting alminum-doped Zinc oxide films (AZO) were prepared by rf magnetron sputtering on glass (corning 1737) substrate, were then annealed at temperature $400^{\circ}C$ for 2hr. The smooth AZO films were etched in diluted HCL (0.5%) to examine the surface morphology properties as a variation of the time. The surface morphology of AZO films increased as a time. We observed texture structure of AZO thin film etched for 1min.

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