한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
- /
- Pages.388-389
- /
- 2006
전기화학 프로세스에 의한 Carbon 특성
Electric Properties of Carbon Using Electrochemical Process
-
이상헌
(선문대학교 전자공학부)
-
Lee, Sang-Heon
(Department of Electronic Eng. Sun Moon University)
- 발행 : 2006.11.09
초록
Electro-deposition of carbon film on silicon substrate in methanol solution was carried out with various current density, solution temperature and electrode spacing between anode and cathode. The carbon films with smooth surface morphology and high electrical resistance were formed when the distance between electrode was relatively wider. The electrical resistance of the carbon films were independent of both current density and solution temperature.