과제정보
연구 과제 주관 기관 : 산자부
한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
- /
- Pages.199-200
- /
- 2006
기판 종류에 따른 AZO 박막 특성에 관한 연구
Study of characteristics of AZO thin film as kind of substrate
-
이규일
(성균관대학교)
;
- 김응권 (성균관대학교) ;
- 이태용 (성균관대학교) ;
- 김봉석 (성균관대학교) ;
-
주정훈
(군산대학교)
;
-
이재형
(군산대학교)
;
- 송준태 (성균관대학교)
-
Lee, Kyu-Il
(Sungkyunkwan Univ.)
;
- Kim, Eung-Kwon (Sungkyunkwan Univ.) ;
- Lee, Tae-Yong (Sungkyunkwan Univ.) ;
- Kim, Bong-Suk (Sungkyunkwan Univ.) ;
-
Ju, Jung-Hun
(Kunsan Univ.)
;
-
Lee, Jae-Hueong
(Kunsan Univ.)
;
- Song, Jun-Tae (Sungkyunkwan Univ.)
- 발행 : 2006.11.09
초록
Transparent conductive alum mum-doped ZnO (AZO) films have been prepared on polycarbonate (PC), Coring 7059 and Quartz substrates by DC sputtering method at room temperature. Films deposited was evaluated about spectra of X-ray diffraction and transmittance and characteristics of films deposited as kind of substrate was compared. Films deposited showed (002) orientation and all AZO films are transparent over 80% within the visible wavelength region.