한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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- Pages.73-74
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- 2006
Fabrication and Characterization of the BLT/STA/Si Structure for Fe-FETs Application
- Park, Kwang-Huna (School of Electrical and Computer Engineering, University of Seoul) ;
- Jeon, Ho-Seung (School of Electrical and Computer Engineering, University of Seoul) ;
- Park, Jun-Seo (School of Electrical and Computer Engineering, University of Seoul) ;
- Im, Jong-Hyun (School of Electrical and Computer Engineering, University of Seoul) ;
- Park, Byung-Eun (School of Electrical and Computer Engineering, University of Seoul) ;
- Kim, Chul-Ju (School of Electrical and Computer Engineering, University of Seoul)
- 발행 : 2010.04.01
초록
Ferroelectric thin films have been widely investigated for future nonvolatile memory application. We fabricated the BLT (
키워드