한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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- Pages.1739-1743
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- 2006
Microstructural investigation of excimer laser-crystallized metallic thin films
- Zhong, R. (Department of Materials Science and Engineering, University of Pittsburgh) ;
- Wiezorek, J.M.K. (Department of Materials Science and Engineering, University of Pittsburgh) ;
- Leonard, J.P. (Department of Materials Science and Engineering, University of Pittsburgh)
- 발행 : 2006.08.22
초록
Recent advances in the microstructural modification of metal films using excimer laser projection irradiation and lateral resolidification are discussed. Pure copper films have been directionally resolidified into large sheet-like grains when properly encapsulated for suppression of liquid-phase dewetting. A survey and quantitative assessment of the defects found in these icrostructures, typical for rapidly solidified metals, is presented.
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