Study of metal plate evaporation using LPS source for AMOLED

  • Hwang, Chang-Hun (OLEDON Technology) ;
  • Kim, Y.K. (OLEDON Technology) ;
  • Shin, Kee-Hyun (Dept. of Mechanical & Aerospace Engineering, Konkuk Univ.) ;
  • Ju, Sung-Hoo (Dept. of Advanced Materials Science & Engineering, Daejin Univ.) ;
  • Kwon, Jang-Hyuk (Dept. of Information Display, Kyung Hee Univ.)
  • Published : 2006.08.22

Abstract

The Gaussian thickness profiles in metal plate evaporation using LPS sources have been studied for the first time. Based on our experimental data, it simulates the organic thin-film uniformity of 3% and very high material usage of 81% for large size AMOLED manufacturing.

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