Controlled interfacial energy for UV-imprinting using resin adhesion to substrates

  • Kim, Jin-Ook (Research and Development Center, LG.Philips LCD) ;
  • Nam, Yeon-Heui (Research and Development Center, LG.Philips LCD) ;
  • Chae, G.S. (Research and Development Center, LG.Philips LCD) ;
  • Chung, In-Jae (Research and Development Center, LG.Philips LCD)
  • 발행 : 2006.08.22

초록

We introduce a modified UV-imprint lithography, a resin transfer from the template to the substrate. We analyzed this method by considering the surface and interfacial free energies of the template-resinsubstrate system. This technique is purely fast and applicable to large area patterning.

키워드