한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Nanoparticle Cleaning of AMLCD Backplane

  • Oh, J.H. (Advanced Display Research Center & Dept. of Information Display, Kyung Hee University) ;
  • Kang, D.H. (Advanced Display Research Center & Dept. of Information Display, Kyung Hee University) ;
  • Choi, M.H. (Advanced Display Research Center & Dept. of Information Display, Kyung Hee University) ;
  • Kim, S.H. (Advanced Display Research Center & Dept. of Information Display, Kyung Hee University) ;
  • Choo, B.K. (Advanced Display Research Center & Dept. of Information Display, Kyung Hee University) ;
  • Hur, J.H. (Advanced Display Research Center & Dept. of Information Display, Kyung Hee University) ;
  • Jang, J. (Advanced Display Research Center & Dept. of Information Display, Kyung Hee University) ;
  • Kim, I.H. (Samsung Fine Chemicals Co., Ltd)
  • Published : 2006.08.22
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Abstract

We have proposed a novel cleaning technology with organic nanoparticles for high-performance TFT array. The surface of the TFT layer becomes more hydrophilic after cleaning by the nanoparticles. This is concluded from the comparison of contact angles for the samples cleaned by various methods. It is found that the drain currents in the subthreshold and off-state regions are less than those for the TFTs cleaned with conventional method.

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