한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Fabrication of Organic Thin-Film Transistors with Polymer Gate Insulators on Plastic Substrate

  • Ahn, Seong-Deok (Electronics and Telecommunications Research Institute) ;
  • Kang, Seung-Youl (Electronics and Telecommunications Research Institute) ;
  • Oh, Ji-Young (Electronics and Telecommunications Research Institute) ;
  • You, In-Kyu (Electronics and Telecommunications Research Institute) ;
  • Kim, Gi-Heon (Electronics and Telecommunications Research Institute) ;
  • Baek, Kyu-Ha (Electronics and Telecommunications Research Institute) ;
  • Kim, Chul-Am (Electronics and Telecommunications Research Institute) ;
  • Suh, Kyung-Soo (Electronics and Telecommunications Research Institute)
  • Published : 2006.08.22
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Abstract

Active layer patterned OTFT was obtained on a plastic substrate using the optimal growth condition of pentancene thin films as active layer and parylene thin films as passivation layer. Tranditional photolithography was performed to use a dry etch to pattern the material stack. The pentacene thin film and parylene thin film were deposited onto a plastic substrate using PC-OVD and CVD, respectively.

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