한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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- Pages.877-881
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- 2006
Sputtering yield and secondary electron emission coefficient ($\gamma$ ) of the MgO, $MgAl_2O_4$ and $MgAl_2O_4/MgO$ thin film grown on the Cu substrate by using the Focused Ion Beam
- Jung, Kang-Won (Dept. of Electrophysics, Kwangwoon University) ;
- Lee, H.J. (Dept. of Electrophysics, Kwangwoon University) ;
- Jeong, W.H. (Dept. of Electrophysics, Kwangwoon University) ;
- Oh, H.J. (Dept. of Electrophysics, Kwangwoon University) ;
- Choi, E.H. (Dept. of Electrophysics, Kwangwoon University) ;
- Seo, Y.H. (Dept. of Electrophysics, Kwangwoon University) ;
- Kang, S.O. (Dept. of Electrophysics, Kwangwoon University) ;
- Park, C.W. (Dept. of Mechanical Engineering, Korea Polytechnic University)
- 발행 : 2006.08.22
초록
We obtained sputtering yields for the MgO,
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