한국정보디스플레이학회:학술대회논문집
- 2006.08a
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- Pages.768-771
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- 2006
(100) Textured Si Films with Controlled Microstructures Obtained via Hybrid SLS
- Wilt, P.C. Van Der (Program in Materials Science and Engineering, Department of Applied Physics and Applied Mathematics, Columbia University) ;
- Chitu, A.M. (Program in Materials Science and Engineering, Department of Applied Physics and Applied Mathematics, Columbia University) ;
- Turk, B.A. (Program in Materials Science and Engineering, Department of Applied Physics and Applied Mathematics, Columbia University) ;
- Chung, U.J. (Program in Materials Science and Engineering, Department of Applied Physics and Applied Mathematics, Columbia University) ;
- Limanov, A.B. (Program in Materials Science and Engineering, Department of Applied Physics and Applied Mathematics, Columbia University) ;
- Im, James S. (Program in Materials Science and Engineering, Department of Applied Physics and Applied Mathematics, Columbia University)
- Published : 2006.08.22
Abstract
Uniformity and performance characteristics of LTPS TFTs are important parameters for making advanced active-matrix displays. In this paper, we describe an SLS-based crystallization approach for producing orientation-controlled Si films with reduced concentrations of planar defects that stand to potentially deliver unprecedented levels of device uniformity and performance. Specifically, a 2-step process referred to as hybrid SLS has been developed that produces a variety of high-quality {100} surface-oriented Si films.
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