한국정보디스플레이학회:학술대회논문집
- 2006.08a
- /
- Pages.544-547
- /
- 2006
Large Area Plasma Characteristics using Internal Linear ICP (Inductively Coupled Plasma) Source for the FPD processing
- Kim, Kyong-Nam (Department of Materials Science and Engineering, Sungkyunkwan University) ;
- Lim, Jong-Hyeuk (Department of Materials Science and Engineering, Sungkyunkwan University) ;
- Yeom, Geun-Young (Department of Materials Science and Engineering, Sungkyunkwan University)
- Published : 2006.08.22
Abstract
In this study, the characteristics of large area internal linear ICP sources of
Keywords