한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
- /
- Pages.21-23
- /
- 2006
Micro-Plasma Device Utilizing SU-8 Photoresist as a Barrier Rib
- Jhuo, Long-Cai (Laboratory for Nanosystem and Plasma, Department of Photonics, Institute of Electro-Optical Engineering, National Chiao Tung University) ;
- Kim, Sung-O (Laboratory for Nanosystem and Plasma, Department of Photonics, Display Institute, National Chiao Tung University)
- 발행 : 2006.08.22
초록
A newly designed micro-plasma device using SU-8 photoresist as a barrier rib has been successfully fabricated and characterized. Operating in neon gas at pressures from 300 to 800 Torr and having hexagonal structure,
키워드