Plasma Sprayed $Al_2O_3-YAG$ Composite Coatings for Microelectronic Applications

  • Lee, Young-Ra (Department of Metallurgical Engineering, Chungnam National University) ;
  • Seok, Hyun-Kwang (Division of Materials Science and Technology, Korea Institute of Science and Technology) ;
  • Baik, Kyeong-Ho (Department of Metallurgical Engineering, Chungnam National University)
  • Published : 2006.09.24