한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 추계학술대회 논문집
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- Pages.671-672
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- 2006
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- 2005-8446(pISSN)
병렬형 2 축 선형운동용 컴플라이언트 메커니즘에 의한 초정밀 스테이지
An Ultra Precision Stage Using a Parallel Compliant Mechanism for 2-axis Linear Motion
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Choi, K.B.
(Intelligent and Precision Machinery Research Division, Korea Institute of Machinery and Materials) ;
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Lee, J.J.
(Intelligent and Precision Machinery Research Division, Korea Institute of Machinery and Materials)
- 발행 : 2006.10.18