Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

  • 2006.10a
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  • Pages.665-666
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  • 2006
  • /
  • 2005-8446(pISSN)
Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Nano-Scale Device Fabrication by Electron Beam Lithography

전자 빔 리소그래피를 이용한 나노 소자 제작

  • Park, S.Y. (Nano-Mechanical System Research Center, Korea Institute of Machinery & Materials) ;
  • Lee, S.W. (Nano-Mechanical System Research Center, Korea Institute of Machinery & Materials) ;
  • Lee, J.J. (Nano-Mechanical System Research Center, Korea Institute of Machinery & Materials)
  • 박수연 (한국기계연구원 나노공정장비연구센터) ;
  • 이승우 (한국기계연구원 나노공정장비연구센터) ;
  • 이재종 (한국기계연구원 나노공정장비연구센터)
  • Published : 2006.10.18
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Abstract

Keywords