Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.10a
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- Pages.665-666
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- 2006
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- 2005-8446(pISSN)
Nano-Scale Device Fabrication by Electron Beam Lithography
전자 빔 리소그래피를 이용한 나노 소자 제작
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Park, S.Y.
(Nano-Mechanical System Research Center, Korea Institute of Machinery & Materials) ;
- Lee, S.W. (Nano-Mechanical System Research Center, Korea Institute of Machinery & Materials) ;
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Lee, J.J.
(Nano-Mechanical System Research Center, Korea Institute of Machinery & Materials)
- Published : 2006.10.18