한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 추계학술대회 논문집
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- Pages.505-506
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- 2006
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- 2005-8446(pISSN)
SEM에서 수치해석을 통한 이차전자 거동해석 및 검출기의 최적위치 선정
A Numerical Analysis on the Behavior of Secondary Electrons and Optimal Mounting Position of a Secondary Electron Detector in SEM
- Kim, Ji-Won (Dept. of Mech. and Automotive Eng., Graduate School, Univ. of Ulsan) ;
- Jeon, Jong-Up (School of Mech. and Automotive Eng., Univ. of Ulsan) ;
- Boo, Kyeung-Seok (Dept. of Mech. and Automotive Eng., Graduate School, Univ. of Ulsan) ;
- Alexey-Deson, Ten (Dept. of Mech. and Automotive Eng., Graduate School, Univ. of Ulsan) ;
- Park, Kyu-Yeol (School of Mech. and Automotive Eng., Univ. of Ulsan)
- 발행 : 2006.10.18