Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

2006.10a
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Pages.369-370
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2006
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2005-8446(pISSN)

Korean Society for Precision Engineering (한국정밀공학회)

권호 표지

Measurement method of precision alignment states using reflective diffraction grating

반사형 회절격자를 이용한 물체 정렬 상태의 고정도 측정법

Ha, T.H. (Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials (KIMM)) ;
Song, E.J. (Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials (KIMM)) ;
Lee, C.W. (Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials (KIMM)) ;
Song, J.Y. (Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials (KIMM))

하태호 (한국기계연구원) ;
송은지 (한국기계연구원) ;
이창우 (한국기계연구원) ;
송준엽 (한국기계연구원)

Published : 2006.10.18

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