Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2006.10a
- /
- Pages.369-370
- /
- 2006
- /
- 2005-8446(pISSN)
Measurement method of precision alignment states using reflective diffraction grating
반사형 회절격자를 이용한 물체 정렬 상태의 고정도 측정법
-
Ha, T.H.
(Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials (KIMM)) ;
- Song, E.J. (Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials (KIMM)) ;
-
Lee, C.W.
(Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials (KIMM)) ;
-
Song, J.Y.
(Intelligent Machine Systems Research Center, Korea Institute of Machinery and Materials (KIMM))
- Published : 2006.10.18