Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)

2006.10a
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Pages.115-116
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2006
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2005-8446(pISSN)

Korean Society for Precision Engineering (한국정밀공학회)

권호 표지

Study on low-k wafer engraving processes by using UV pico-second laser

UV pico-second 레이저를 이용한 low-k 웨이퍼 인그레이빙 특성 연구

Moon, S.W. (Institute for Advanced Engineering) ;
Bae, H.S. (Institute for Advanced Engineering) ;
Hong, Y.S. (Institute for Advanced Engineering) ;
Nam, G.J. (Institute for Advanced Engineering) ;
Kwak, N.H. (JET TECH., LTD)

문성욱 (고등기술연구원) ;
배한성 (고등기술연구원) ;
홍윤석 (고등기술연구원) ;
남기중 (고등기술연구원) ;
곽노흥 ((주)젯텍)

Published : 2006.10.18

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