적층 압전액츄억이터 소자의 온도해 따른 전기적 특성

Electrical properties of multilayer piezoelectric actuator with the variations of temperature

  • 발행 : 2006.10.27

초록

In this paper, multilayer piezoelectric actuator was fabricated in order to develop ultrasonic linear motor. Multilayer actuator showed a high density of 7.78[$g/cm^3$], a large effective electromechanical coupling factor($K_{eff}$) of 0.259, a high mechanical quality factor( Qm ') of 1301, and high capacitance(c) of 19.32[nF]. Curie temperature was $343[^{\circ}C]$.

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