적층 압전액츄억이터 소자의 온도해 따른 전기적 특성

Electrical properties of multilayer piezoelectric actuator with the variations of temperature

In this paper, multilayer piezoelectric actuator was fabricated in order to develop ultrasonic linear motor. Multilayer actuator showed a high density of 7.78[$g/cm^3$], a large effective electromechanical coupling factor($K_{eff}$) of 0.259, a high mechanical quality factor( Qm ') of 1301, and high capacitance(c) of 19.32[nF]. Curie temperature was $343[^{\circ}C]$.